Facilities
Facilities
Nano fabrication
Clean room
Mask Aligner
Reactive Ion Etcher
Wire Bonder
Thin Film Deposition Room
Cr/Au Evaporator
Ti/Au Evaporator
Pb Evaporator
Oxygen Plasma Cleaner
Ar Ion Miller
Sputtering
Cryogenics Room
He4 Cryostat (Janis)
He3 Cryostat (Oxford)
Dilution Refrigerator
Triton Dilution Refrigerator
Other CMMP facilites (shared)
Contact Dr. Eric Lochner
Cryogenics
Ellipsometry
Magneto-transport measurements
Profilometry
Scanning Electron Microscopy (SEM)
Scanning Probe Microscopy (SPM and AFM)
SQUID Magnetometry (MPMS)
X-ray diffraction (XRD)
X-ray Photoelectron Spectroscopy (XPS)